As a dedicated partner in Korea's thriving nanotechnology industry, COXEM Co., Ltd. is committed to shaping our future as a leading force in nanotechnology. We pledge to work hard to become a global leader in electron microscopy, focusing on technological innovation and driving excellence across the international market.
World First tabletop SEM integrated with EDS-EBSD.
Ion Beam Polisher
User friendly and most powerful ion beam polisher in the market.
EM-40 Tabletop SEM
The EM-40 represents COXEM's latest addition to their expanding family of Tabletop SEMs. The EM-40 comes with ultra-fast 5th-generation signal processing technology and provides high-quality imaging at frame rates of up to 13 fps. Four imaging modes (Fast, Slow, UltraFast, and Photo) allow the user to choose the image quality and speed that best fits their application.
The EM-30N is our most popular model of tungsten filament-based Tabletop SEM. Featuring our 5th generation DSP (Digital Signal Processing) technology it delivers crystal-clear, low noise images even at high magnification. Panorama Mode allows delivers wide-area scanning capability, while LV (Low Vacuum) gives you the ability to capture pristine, high-quality images of non-conductive samples without coating. The EM-30N is also the world’s first tabletop SEM that seamlessly integrates with compact EBSD, further elevating its versatility and performance.
The IP-10K is COXEM’s upgraded Ion Beam Polisher, equipped with various options including flat-milling, cooling stage, and the air-protection module, ensuring enhanced performance and versatility for a wide range of applications. It off ers unparalleled capabilities for the precision milling of materials at the microscale levels, providing exceptional cleanliness and accuracy.
The CP-8000+ is an advanced sample preparation tool that etches a cross section of a sample using an argon ion beam. This process avoids physical deformation and structural damage, without requiring complicated chemical processes. In addition, the system simplifies cross-sectional analysis of the sample by processing large areas from tens of um to several mm.
The ion coater, SPT-20, is a device used for coating conductive materials (Au, Pt, Pd, Pt-Pd) onto the sample surfaces by using DC sputtering principle. Non-conductive samples are also used for observation under electron microscopes, and they are used to protect the sample surfaces from the injected electron beam and to help the electron flow. It can be used as an electrode formation of thin film type too.
Digital ion coater
Vacuum. coating. One touch coating system up to the normal pressure
Stable coating with coating Current Feedback function
The QUANTAX ED-XS system provides advanced EBSD and EDS capabilities in a compact solution, enhancing the analytical performance of our tabletop SEMs. This integration allows for comprehensive material analysis with unparalleled precision and efficiency, bringing powerful analytical tools to a compact form factor.
EBSD detector: e-Flash XS hardware
Native image resolution: 720 x 540 pixels
Supported binning modes: 2x2, 3x3 4x4, 5x5, 6x6
Speed: 525 frames/second (fps) in all binning modes
User removable detector head – slide-in & -out mechanism
User replaceable phosphor screen
ED-XS EDS Detector
EDS detector: QUANTAX hardware
Energy resolution < 129 eV at MnKa
Excellent light element and low energy performance (B - Am element range)
30 mm2 active area
Extremely high pulse load capability
Vibration-free, Peltier cooled
AZtecOne with XploreCompact 30 & 65
The AZtecOne system combines the simple-to-use yet powerful AZtecOne software with the proven stability and accuracy of the 30mm² and 65mm² XploreCompact EDS Detectors. It includes all the tools required to help you quickly analyze and characterize your sample with confidence and ease. Unique Tru-Q technology ensures that elements are automatically identified and quantified to new levels of accuracy. The introduction of the Xplore 65 detector, with its 65mm² sensor size, allows you to collect data over two times faster without loss of performance, unlocking greater EDS analysis capabilities.
STEM
Optional product STEM is an analysis tool used to generate transmission images, on the basis of a table-top ‘Scanning Electron Microscope’ (SEM), by detecting electrons that had been projected onto a specimen in a two-dimensional manner through electron beams generated by an electron gun. This tool allows scholars in the ‘life sciences’ field to observe the information of cells beneath the surface and their structure and, in material science, nanostructures by using its small braille beams and rich luminance.
Cool Stage
Cool stage is a device that assists to very rapidly freeze liquid samples or samples holding moisture to maintain the current state so that they can be filmed effectively. Also, it can be heated, so the variation of samples according to temperature changes can be observed in real time. 1. Cool Stage is a device that rapidly freezes and films samples. 2. Since the electron microscope can not film a liquid state, it can measure effectively by freezing the liquid state to measure it in a solid state. 3. It is possible to measure the change of samples in accordance to the temperature change by heating. 4. If used with the BSE detector, users can obtain more efficient images.
Founded as a small company for manufacturing programmable control units for general purposes, upgrading analogue scanning electron microscopes and manufacturing accessories for them in 1991, the TESCAN is today one of the global suppliers of scanning electron microscopes and solutions for materials science, industry, biology and life sciences, forensic science and others.
TESCAN VEGA
TESCAN VEGA’s 4th generation Scanning Electron Microscope (SEM) with tungsten filament electron source combines SEM imaging and live elemental composition analysis in a single window of TESCAN’s Essence™ software. This combination significantly simplifies acquisition of both morphological and elemental data from the sample, making VEGA SEM an efficient analytical solution for routine materials inspection in quality control, failure analysis and research labs.
TESCAN MIRA’s 4th generation Scanning Electron Microscope (SEM) with FEG Schottky electron emission source combines SEM imaging and live elemental composition analysis in a single window of TESCAN’s Essence™ software. This combination significantly simplifies the acquisition of both morphological and elemental data from the sample, making MIRA SEM an efficient analytical solution for routine materials inspection in quality control, failure analysis and research labs.
Field-free analytical UHR SEM
for materials characterization at nanoscale. Ideal for characterization of materials at low beam energies for maximum surface topography. Excellent imaging of beam-sensitive and non-conductive samples. Fully automated setup of electron beam – optimal imaging conditions are guaranteed by the In-Flight Beam Tracing™. Unique In-Beam Multidetector design allowing angle and energy selective BSE detection
UHR SEM for nanomaterials characterization at sub-nanometer scale. High-resolution and high-contrast imaging of nextgen materials (e.g. catalyst structures, nanotubes, nanoparticles and other nanoscale structures). Excellent platform suitable for SEM/STEM metrology at sub-nanometer scale. Multi-detector system TriBE™ and TriSE™ for sample nanocharacterization
Versatile UHR cryo-SEM for characterization of your biological and other beam-sensitive specimens. UHR SEM imaging of beam-sensitive samples and non-conductive biological materials at low kV. Excellent imaging capabilities under cryogenic conditions. Routine imaging of nanostructures as well as bulk specimens with the dedicated E-T detect. Extended field-of-view and easy navigation across sample with the Wide Field Optics™ design
TESCAN TIMA delivers high speed, detailed measurements from sample batches unique to mineral processing and the mining industry. Using elemental analysis to provide quantitative data for mineral identification, TIMA does what no other analytical tool in a processing plant does: measure and sort particles for size, composition and texture. TIMA’s operating system features built-in application-specific workflows, along with a database of virtually all mineral species (about 5000 entries) to make the task of interpreting mineral presence significantly easier.
A unique combination of Plasma FIB and field-free UHR FE-SEM for multiscale materials characterization. High throughput, large area FIB processing up to 1 mm. Ga-free microsample preparation. Ultra-high resolution, field-free FEG-SEM imaging and analysis. In-lens SE and BSE detection. Resolution optimization for high-throughput, multi-modal FIB-SEM tomography. Superior field of view for easy navigation. Essence™ easy-to-use, modular graphical user interface
Versatile nanoanalytical FIB-SEM to expand your materials research capabilities. High precision micro sample preparation. Ultra-high resolution field-free SEM imaging and nanoanalysis. Extended field of view and easy navigation. Multi-site process automation. Multi-modal FIB-SEM tomography. Easy-to-use modular software user interface. Attractive optional packages for various applications
Advanced nanofabrication workbench for your research lab. Excellent ultra-high resolution SEM imaging. Best resolution Ga FIB column. High precision nanopatterning engine for electron and ion beams. Multi-gas injection system with a variety of precursor gases. Easy-to-use modular software user interface
A Plasma FIB-SEM platform for deep sectioning and the highest resolution end-pointing for package level failure analysis. Curtaining-free large-area cross-sectioning for physical failure analysis of advanced packaging technologies. Prepare large area FIB-cross-sections up to 1 mm wide. Obtain low noise, high-resolution image at low keVs in short acquisition time at FIB-SEM coincidence with the sample tilted. Live SEM-monitoring during FIB milling for precise end-pointing. Observe the most beam-sensitive materials using low keVs ultra-high resolution for surface sensitivity and high material contrast. Effective techniques and recipes for fast and artefact-free cross-sectioning of composite samples (OLED and TFT displays, MEMS devices, isolation dielectrics) at high currents
Complex, yet time-efficient analysis and characterization of structures at the nanoscale is possible only by advanced correlative imaging and automation across various instruments. The AFM-in-SEM approach merges Atomic Force Microscopy and Scanning Electron Microscopy into one tool thatcombines the capabilities of both techniques. Additionally, NenoVision‘scutting-edge correlative imaging of AFM and SEM data sets the product apart from the competition, making NenoVision’s unique Atomic Force Microscope, LiteScope™,the most advanced AFM in SEM on the market.
An ultramicrotome that transforms a normal SEM to a volume SEM. Serial block-face SEM In serial block-face imaging, a microtome resides inside the vacuum chamber of an SEM. A diamond knife repeatedly removes a thin surface layer from the sample block. The removed layer can be as thin as 15 nm. After each sectioning, the exposed block surface is imaged. This automated in situ method can acquire a series of electron micrographs over a large volume.
Safematic GmbH is a dynamic company, a leader in innovative compact high vacuum coating systems.
The company is located in St. Gallen’s Rhine Valley a region full of experts in the field of vacuum and coating technology.
The products of Safematic are manufactured in Switzerland. Safematic provides support and consulting for customers in the field of high vacuum coating technology. Relying on our experienced development team, we are capable of realising customised and functional extensions or new developments efficiently and professionally.
WORLD FIRST CARBON FEEDING CONTINUOUSLY IN CARBON EVAPORATION HEAD WITH FINE CARBON COATER WITHOUT ANY ARCING
Sputtering of indium tin oxide (ITO) and carbon possible
Coat-thickness measurement via double-quartz measuring system (small samples at the centre, large samples at the edge)
Integrated membrane pump (MD 1 Vario-SP)
Integrated turbo pump (Hi Pace 80)
Easy creation of coating recipes, which guarantee reproducible results
Graphical representation of process data with Windows-based Coating LAB software
5.7“ TFT-Touch graphical display
HIGHLIGHTS
Patented unrolling for automatic thread transport in the vacuum.
Automatic target shutter protects your samples during the degassing of the carbon thread.
Electronically controlled process vacuum ensures stable pressure in the receptacle.
Detection and monitoring of implosion guard guarantees safe operation.
Plasma treatment of your sample is possible thanks to an optional plasma unit.
CDS-020 Compact Drying System
Dehydrating and Critical Point Drying in One System
Safematic CDS-020 COMPACT DRYING SYSTEM
World First! Fully Automated Dehydration and Critical Point Drying of your
samples in ONE device.
The advantages:
- fully automated hands off process without necessity of monitoring
- start a process in the evening get your dried specimen in the morning
- greater process reliability and traceability due recipes and process tracking
- dehydration and critical point drying in ONE piece of equipment
- less space required in the laboratory
- samples up to the size of 30mm
- less sample handling
- no use of refrigerants
Water-containing structures or moist samples (usually biological) can be altered or destroyed during drying in air or in a vacuum. Critical point drying with the safematic CDS-020 is an efficient method to preserve these structures. The tangential forces of interfacial tension that occur during drying between water and air are avoided by transferring the liquid phase of CO2 into the gas phase without a phase transition. For this purpose, water is replaced by the solvent ethanol that is miscible with liquid CO2, as this can then be exchanged for CO2 again. The steps required to prepare any hydrated biological samples for SEM/TEM include fixation, dehydration, critical point drying, mounting, and coating with metal to improve electron conductivity of sample surface. The safematic Compact Drying System CDS-020 covers the steps of dehydration and critical point drying. The automated process produces repeatable high quality results.
Product Highlight
High Resolution Tabletop SEM
The EM-40 represents COXEM's latest addition to their expanding family of Tabletop SEMs. The EM-40 comes with ultra-fast 5th-generation signal processing technology and provides high-quality imaging at frame rates of up to 13 fps. Four imaging modes (Fast, Slow, UltraFast, and Photo) allow the user to choose the image quality and speed that best fits their application.
COXEM IP-10K Ion Beam Polisher
Fastest ion milling in the market 1,000um/hr (Si).
The IP-10K is COXEM’s upgraded Ion Beam Polisher, equipped with various options including flat-milling, cooling stage, and the air-protection module, ensuring enhanced performance and versatility for a wide range of applications.
SAFEMATIC COMPACT DRYING SYSTEM
CDS-020 Compact Drying System
Water-containing structures or moist samples (usually biological) can be altered or destroyed during drying in air or in a vacuum.
Critical point drying with the safematic CDS-020 is an efficient method to preserve these structures. The tangential forces of interfacial tension that occur during drying between water and air are avoided by transferring the liquid phase of CO2 into the gas phase without a phase transition. For this purpose, water is replaced by the solvent ethanol that is miscible with liquid CO2, as this can then be exchanged for CO2 again.
The steps required to prepare any hydrated biological samples for SEM/TEM include fixation, dehydration, critical point drying, mounting, and coating with metal to improve electron conductivity of sample surface.
The safematic Compact Drying System CDS-020 covers the steps of dehydration and critical point drying. The automated process produces repeatable high quality results.
SAFEMATIC HV Carbon Coater
CCU-010 A SMART DEVICE
Whether you wish to sputter, vaporise or plasma treatcarbon – you can configure the device with the right process head for all these applications.
DO NOT WASTE TIME
The device is operational within a short time. The use of high-quality materials and components in combination with innovative ideas produces extraordinarily short process times. The automatic mode allows for reliable and consistent production of thin coatings.
COMPACT AND PRACTICAL
Saving valuable space thanks to small dimensions. Weight has been reduced to a minimum. Standardised small-flange quick connections („ISO-KF“) act as interfaces with your connections.
EASY START-UP AND SERVICING
Unpack, connect, start! Do away with high start-up costs. The plug-and-play concept allows you to start up the device by yourself. You only need to connect the power supply and process gas.
The service technician can run a quick error analysis thanks to the integrated USB service interface. The modular set-up allows for the targeted replacement of defective components.
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